| 摘要 |
The present invention aims to provide a chuck system having a member with adhesive strength based on Van der Waals′ force, which makes it possible to support an adsorbed member without applying a voltage or forming a vacuum line by using an adsorption member which can provide adhesive strength with only Van der Waals′ force. To achieve this purpose, provided is a chuck system having a member with adhesive strength based on Van der Waals′ force, which comprises: a base substrate; an adsorbed substrate installed to be distanced from the base substrate to support the adsorbed member; an adsorbing unit installed on the base substrate and the adsorbed substrate to adsorb the adsorbed member by adhesive strength using Van der Waals′ force; a rotating unit for rotating the base substrate and the adsorbed substrate; and a conveying unit for conveying one among the base substrate and the adsorbed substrate. |
