发明名称 POWDER FEEDER, FILM-FORMING DEVICE, AND FILM-FORMING METHOD
摘要 This powder feeder (1) is provided with a stirring section (3) for stirring a starting material (6) and an aerosolization section (4) for taking in the stirred starting material (6) and a carrier gas, aerosolizing the starting material (6), and generating an aerosol (62). Downstream of the aerosolization section (4), a discharge port (53) for discharging the aerosol (62) is provided. A partition wall (8) is provided between the stirring section (3) and the aerosolization section (4). In the partition wall (8), guide holes (8H), which expand from the stirring section (3)-side to the aerosolization section (4)-side and are for guiding the stirred starting material (6) to the aersolization section (4), are formed.
申请公布号 WO2016043269(A1) 申请公布日期 2016.03.24
申请号 WO2015JP76484 申请日期 2015.09.17
申请人 SEKISUI CHEMICAL CO., LTD. 发明人 SUZUKI TAKASHI;KATAGIRI TOMOAKI;KUNUGI SHUNSUKE
分类号 C23C24/04 主分类号 C23C24/04
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