发明名称 |
LED VERTICAL CHIP STRUCTURE WITH SPECIAL COARSENING MORPHOLOGY AND PREPARATION METHOD THEREFOR |
摘要 |
A method for improving luminous efficiency of an LED in a vertical structure. First, an LED vertical chip structure with a special coarsening morphology is provided, and micron-scale holes (311) are formed in the surface of an epitaxial structure layer (300) and submicron-scale holes (312) are formed at the bottom of the micron-scale holes. The light emitting surface structure can increase the emission probability of light inside a device, and can greatly improve the light emission efficiency. Also provided is a preparation method for the chip structure. Micron-scale holes (311) are formed in an epitaxial structure layer (300) by stripping a growth substrate (100) with micron-scale bumps, and submicron-scale holes (312) are formed at the bottom of the micron-scale holes (311) by means of etching. The method is simple in process, can be applied to large-scale industrial production, and can greatly improve the luminous efficiency of the LED in the vertical structure. |
申请公布号 |
WO2016041471(A1) |
申请公布日期 |
2016.03.24 |
申请号 |
WO2015CN89497 |
申请日期 |
2015.09.14 |
申请人 |
ENRAYTEK OPTOELECTRONICS CO., LTD. |
发明人 |
TONG, LING;ZHANG, QIONG;LV, MENGYAN;ZHANG, YU;LI, QIMING |
分类号 |
H01L33/22;H01L33/00 |
主分类号 |
H01L33/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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