| 摘要 |
An object table is described which comprises a support surface to support an object and a lifting mechanism to displace the object from the support surface in a direction substantially perpendicular to the support surface. The lifting mechanism comprises one or more elongated rods extending in the direction substantially perpendicular to the support surface; the one or more elongated rods being displaceable between a first position, wherein the one or more elongated rods are positioned below the support surface, and a second position, wherein the one or more elongated rods protrude the support surface through one or more apertures of the support surface, to support the object at a distance from the support surface. The mechanism further comprises a housing, a bearing configured to enable a substantially frictionless displacement of the one or more elongated rods between the first position and the second position and an actuator configured to displace the one or more elongated rods between the first position and the second position. The mechanism further includes a locking mechanism configured to limit a rotation about a longitudinal axis of the one or more elongated rods, the locking mechanism comprising an elastic element that is mechanically connected to both the housing and the one or more elongated rods, the elastic element being configured to have a comparatively low stiffness in the support direction and a comparatively high stiffness in a rotational direction about the longitudinal axis. |
