| 发明名称 |
RETAINER AND WAFER CARRIER INCLUDING THE SAME |
| 摘要 |
A retainer for a wafer carrier comprising: a body including a plurality of slots configured to receive side surfaces of wafers; and for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer. |
| 申请公布号 |
US2016082569(A1) |
申请公布日期 |
2016.03.24 |
| 申请号 |
US201514729030 |
申请日期 |
2015.06.02 |
| 申请人 |
BAE Sang-Hyun;JUNG Kyu-Dong;KIM Il-Hwan;KIM Jung-Hwan;LEE Hyuek-Jae;CHO Tae-Je |
发明人 |
BAE Sang-Hyun;JUNG Kyu-Dong;KIM Il-Hwan;KIM Jung-Hwan;LEE Hyuek-Jae;CHO Tae-Je |
| 分类号 |
B24B37/32 |
主分类号 |
B24B37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A retainer for a wafer carrier comprising:
a body including a plurality of slots configured to receive side surfaces of wafers; and for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer. |
| 地址 |
Seoul KR |
