CERAMIC STRUCTURE, MEMBER FOR SUBSTRATE HOLDING DEVICE, AND METHOD FOR MANUFACTURING CERAMIC STRUCTURE

摘要

A ceramic structure 10 in which an electrode 14 is provided inside a disc-shaped ceramic base 12. The ceramic base 12 is a sintered body having, as the main component, alumina or a rare earth metal oxide. The ceramic base 12 has a thermal expansion coefficient of 7.5-9.5 ppm/K at 40-1200°C. The main component of the electrode 14 is metal ruthenium. The electrode 14 may be formed to a sheet shape, or may be formed in a single-stroke pattern so as to spread throughout the entire surface.