| 发明名称 |
METHOD, DEVICE AND SYSTEM FOR ENRICHMENT OF NF3 GAS |
| 摘要 |
Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases. |
| 申请公布号 |
US2016083254(A1) |
申请公布日期 |
2016.03.24 |
| 申请号 |
US201514857423 |
申请日期 |
2015.09.17 |
| 申请人 |
OCI COMPANY LTD. |
发明人 |
LIM Dong-Won;SHIN Jong-Eun;KIM Youn-Joong;KIM Hyun-Jun;LEE Sang-Yup |
| 分类号 |
C01B21/083;B01D53/22 |
主分类号 |
C01B21/083 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases. |
| 地址 |
Seoul KR |
