INSPECTION UNIT, SPECIMEN ANALYSIS DEVICE, AND INSPECTION METHOD

摘要

In the present invention, when it is determined that a point plotted on a graph is positioned on a discrimination curve DC or above the discrimination curve DC, a decision unit determines that a specular reflection region is included in imaging data for a measurement surface. A second detection brightness and a second decrease rate are computed, after which a measurement item is assessed using the second decrease rate as an assessment index. When it is determined that a point plotted on a graph is positioned below the discrimination curve DC, the decision unit determines that a specular reflection region is not included in the imaging data for the measurement surface. A measurement item is assessed using a first decrease rate as the assessment index.