PIXEL ARRAY OF IMAGE SENSOR AND METHOD OF FABRICATING THE SAME

摘要

A pixel array of an image sensor includes multiple red, green, blue and panchromatic pixels. The red, green and blue pixels are formed on a substrate during a first process. Planarization material is deposited to form the panchromatic pixels on the substrate and to form a planarization layer on the red, green and blue pixels during the same second process subsequent to the first process. The planarization material of the panchromatic pixels and the planarization layer is characterized in high transmittance and high aspect ratio.

主权项

1. A pixel array of an image sensor, comprising:
a first color pixel formed on a substrate and configured to sense light of a first optical spectrum; a panchromatic pixel formed on the substrate and configured to sense light of a second optical spectrum; and a planarization layer formed on the first color pixel and panchromatic pixel, wherein:
the panchromatic pixel and the planarization layer have an integrated structure which is formed in a same process using a planarization material; anda range of the second optical spectrum is larger than a range of the first optical spectrum.