MAGNETIC FIELD SENSOR

摘要

A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement sensors, a group of Z direction displacement sensors and a power supply; wherein the mass block, the Y direction displacement sensors and the Z direction displacement sensors respectively comprise a plurality of metal layers and a dielectric layer between two metal layers. In the mass block, a region corresponding to the Y direction displacement sensors and a region corresponding to the Z direction displacement sensors respectively comprise at least two metal layers connected by a via. The Y direction displacement sensors include two electrodes, each comprising at least two metal layers connected by a via; the Z direction displacement sensor includes two electrodes, each comprising at least two metal layers connected by a via; and the power supply provides a current flowing through the mass block selectively in X or Y direction.

主权项

1. A magnetic field sensor, comprising a suspending mass block, a group of Y direction displacement detection electrodes, a group of Z direction displacement detection electrodes and a power supply module;
wherein the Y direction represents one of two orthogonal directions of a plane where the mass block is arranged and the Z direction represents a direction perpendicular to the plane, wherein: the mass block has a longitudinal direction parallel to the Y direction and comprises a plurality of metal layers and a plurality of dielectric layers, with the dielectric layers and metal layers being stacked with each other; the Y direction displacement detection electrodes and the Z direction displacement detection electrodes respectively comprise a plurality of metal layers and a dielectric layer between any two metal layers; in the mass block, a portion corresponding to the Y direction displacement detection electrodes comprises at least two metal layers connected by a via and a portion corresponding to the Z direction displacement detection electrodes comprise at least two metal layers connected by a via; and the Y direction displacement detection electrodes comprise two sub-groups of electrodes, each comprising at least two metal layers connected by a via, and the Z direction displacement detection electrodes also comprise two sub-groups of electrodes, each comprising at least two metal layers connected by a via; and the power supply module provides a current flowing through the mass block selectively in the X or Y direction.