发明名称 |
DEVICE AND METHOD FOR DETACHING A PRODUCT SUBSTRATE FROM A CARRIER SUBSTRATE |
摘要 |
The invention relates to a method for detaching a product substrate (6), which is connected to a carrier substrate (2) by a connecting layer (5) and which was processed on the carrier substrate (2), from the carrier substrate (2), the connecting layer (5) comprising an edge zone (3) having high adhesion and an anti-adhesion zone (14) arranged within the edge zone (3), characterized in that a peripheral segment (13) of the product substrate (6) arranged in the region of the edge zone (3) is severed from the product substrate (6) before the product substrate (4) is detached from the carrier substrate (2). |
申请公布号 |
WO2016041644(A1) |
申请公布日期 |
2016.03.24 |
申请号 |
WO2015EP60308 |
申请日期 |
2015.05.11 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
BURGGRAF, JÜRGEN;KAINZBAUER, MARTIN |
分类号 |
H01L21/683 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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