DETECTION DEVICE AND DETECTION METHOD

摘要

The present invention discloses a detection device and a detection method, wherein the detection device includes a seal chamber, a gas flow output unit and a gas flow detection unit, a substrate to be detected is horizontally placed in the seal chamber, the gas flow output unit is located in the seal chamber and below the substrate, the gas flow output unit is connected with the seal chamber, the gas flow output unit is used for outputting detection gas flow to the upper surface of the substrate, and the gas flow detection unit is used for detecting whether leak gas flow exists on the lower surface of the substrate. The leak gas flow exists on the lower surface of the substrate is detected by the gas flow detection unit, and whether the substrate is damaged is judged based on a detection result of the gas flow detection unit.

主权项

1. A detection device used for detecting whether a substrate is damaged, comprising:
a seal chamber, wherein a substrate to be detected is horizontally placed in the seal chamber; a gas flow output unit, wherein the gas flow output unit is connected with the seal chamber, and the gas flow output unit is used for outputting detection gas flow to the upper surface of the substrate; and a gas flow detection unit, wherein the gas flow detection unit is located below the substrate, and the gas flow detection unit is used for detecting whether leak gas flow exists on the lower surface of the substrate, if the gas flow detection unit detects that the leak gas flow exists on the lower surface of the substrate, it is judged that the substrate is damaged; if the gas flow detection unit detects that no leak gas flow exists on the lower surface of the substrate, it is judged that the substrate is not damaged.