发明名称 INTERNAL TREATMENT METHOD AND DEVICE, IN PARTICULAR FOR COATING THE INSIDE OF A PIPE
摘要 The invention relates to an internal treatment method, in particular for coating the inside of a pipe (2, 4, 6), in which method a plasma (36, 72, 132) is generated inside the pipe being treated or coated (2, 4, 6) and the plasma (36, 72, 132) is generated by means of a plasma generation module (12, 42, 62, 82, 112, 122, 162) moved through the pipe (2, 4, 6). The invention further relates to an internal treatment method, in particular for coating the inside of a pipe (202), in which method an inductively or capacitively coupled plasma (206) is generated inside the pipe (202) and optionally a precursor (38) is made to interact in such a way with the plasma (206) that a coating (8) is formed on the inside of the pipe (202). The invention further relates to a device (10, 40, 60, 80, 110, 120, 140, 160) designed to carry out one of these methods or having corresponding means for carrying out one of these methods, as well as an internal treatment device (10, 40, 60, 80, 110, 120, 140, 160), in particular for coating the inside of a pipe (2, 4, 6), having a plasma generation module (12, 42, 62, 82, 112, 22, 162) designed to be moved through a pipe (2, 4, 6) and to generate a plasma (36, 72, 132) inside the pipe (2, 4, 6), and a transport mechanism (16) designed to move the plasma generation module (12, 42, 62, 82, 112, 122, 162) through the pipe (2, 4, 6).
申请公布号 WO2016041900(A1) 申请公布日期 2016.03.24
申请号 WO2015EP70950 申请日期 2015.09.14
申请人 SIEMENS AKTIENGESELLSCHAFT;PLASMATREAT GMBH 发明人 EDER, FLORIAN;MALEIKA, MAREK;SCHMIDT, MARTIN;BUSKE, CHRISTIAN;KNOSPE, ALEXANDER
分类号 C23C16/04;C23C16/50 主分类号 C23C16/04
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