发明名称 PIEZOELECTRIC DRIVE DEVICE AND DRIVE METHOD OF THE SAME, ROBOT AND DRIVE METHOD OF THE ROBOT
摘要 PROBLEM TO BE SOLVED: To decrease an electrostatic capacitance of a piezoelectric drive device.SOLUTION: A piezoelectric drive device includes a piezoelectric vibrator that has a plurality of piezoelectric elements each comprising a first electrode, a second electrode, and a piezoelectric material positioned between the first electrode and the second electrode, and that is arranged on at least one of a first surface and a second surface of a diaphragm. The above piezoelectric elements are connected in series.SELECTED DRAWING: Figure 1
申请公布号 JP2016040986(A) 申请公布日期 2016.03.24
申请号 JP20140164620 申请日期 2014.08.13
申请人 SEIKO EPSON CORP 发明人 MIYAZAWA OSAMU
分类号 H02N2/00;B06B1/06;B25J17/00;H01L41/053;H01L41/09 主分类号 H02N2/00
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