PIEZOELECTRIC DRIVE DEVICE, ROBOT, AND DRIVE METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To solve such a problem that a greater drive current is required when a piezoelectric material is reduced in thickness.SOLUTION: A piezoelectric drive device includes a piezoelectric material, an electrode provided on the piezoelectric material, and a drive circuit to apply a drive voltage to the electrode. The piezoelectric material has a thickness of 0.05 μm or more and 20 μm or less. The drive voltage is a sum voltage of a varying voltage and an offset voltage.SELECTED DRAWING: Figure 5