| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor that prevents a detection electrode from vibrating by driving and is free of influences of a linear acceleration and influences of an angular velocity of other axes than a detection axis.SOLUTION: The physical quantity sensor includes: a substrate; a first displacement part and a second displacement part 21, 31 disposed in a space plane on the substrate and having rotation axes 22, 32, respectively; a fixed electrode part disposed on the substrate at positions opposing to the first displacement part and the second displacement part 21, 31; a support part 40 supporting the respective rotation axes of the first displacement part and the second displacement part; a fixed part 50 supporting the support part 40 via a spring 60; and a drive part 70 vibrating the support part 40 in a vibration direction. The first displacement part and the second displacement part are displaceable in a perpendicular direction with respect to the space plane around the rotation axis; each rotation axis is disposed as deviated from the center of gravity of the first displacement part or the second displacement part; and directions of deviation from the center of gravity are opposite to each other in the rotation axis 22 of the first displacement part 21 and in the rotation axis 32 of the second displacement part 31.SELECTED DRAWING: Figure 1 |
