发明名称 EPITAXIAL FORMATION SUPPORT STRUCTURES AND ASSOCIATED METHODS
摘要 Epitaxial formation support structures and associated methods of manufacturing epitaxial formation support structures and solid state lighting devices are disclosed herein. In several embodiments, a method of manufacturing an epitaxial formation support substrate can include forming an uncured support substrate that has a first side, a second side opposite the first side, and coefficient of thermal expansion substantially similar to N-type gallium nitride. The method can further include positioning the first side of the uncured support substrate on a first surface of a first reference plate and positioning a second surface of a second reference plate on the second side to form a stack. The first and second surfaces can include uniformly flat portions. The method can also include firing the stack to sinter the uncured support substrate. At least side of the support substrate can form a planar surface that is substantially uniformly flat.
申请公布号 US2016087152(A1) 申请公布日期 2016.03.24
申请号 US201514959271 申请日期 2015.12.04
申请人 Micron Technology, Inc. 发明人 Sheen Calvin Wade
分类号 H01L33/32;H01L33/48 主分类号 H01L33/32
代理机构 代理人
主权项
地址 Boise ID US