| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element in which changes in a metal fine structure layer are suppressed during storage and the metal fine structure layer can be easily used in a state similar as much as possible to the designed structure.SOLUTION: The sensor element of the present invention includes: a substrate with a metal fine structure layer disposed on one main surface thereof; a first cover disposed on the first main surface of the substrate and forming a cavity that houses a part of the metal fine structure layer; and a second cover disposed on the first main surface of the substrate and forming a cavity that houses a different part of the metal fine structure layer from the above part of the metal fine structure layer. The first cover and the second cover are sucked to the substrate when the pressure in the cavities formed by the covers is less than the pressure outside the cavities, and are away from the substrate when the pressure in the cavities is equal to or higher than the pressure outside the cavities. The pressure in the cavity formed by the first cover is different from the pressure in the cavity formed by the second cover.SELECTED DRAWING: Figure 1 |
