| 发明名称 |
OPTICAL PATTERN TRANSFER MASK AND METHOD OF FABRICATING THE SAME |
| 摘要 |
An optical pattern transfer mask includes a light transmissive substrate, a reflection layer pattern on a plurality of first regions of the light transmissive substrate, a light absorbing layer on the light transmissive substrate and the reflection layer pattern, and a bank layer pattern on the light absorbing layer corresponding to the plurality of first regions of the light transmissive substrate, the bank layer pattern being vertically aligned with the reflection layer pattern. The bank layer pattern includes a Diels-Alder polymer that is polymerizable and depolymerizable by a reversible Diels-Alder reaction. |
| 申请公布号 |
US2016085146(A1) |
申请公布日期 |
2016.03.24 |
| 申请号 |
US201514640512 |
申请日期 |
2015.03.06 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
KWON Younggil |
| 分类号 |
G03F1/38;G03F1/00 |
主分类号 |
G03F1/38 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An optical pattern transfer mask, comprising:
a light transmissive substrate; a reflection layer pattern on a plurality of first regions of the light transmissive substrate; a light absorbing layer on the light transmissive substrate and the reflection layer pattern; and a bank layer pattern on the light absorbing layer corresponding to the plurality of first regions of the light transmissive substrate, the bank layer pattern being vertically aligned with the reflection layer pattern, wherein the bank layer pattern includes a Diels-Alder polymer that is polymerizable and depolymerizable by a reversible Diels-Alder reaction. |
| 地址 |
Yongin-City KR |
