发明名称 FIN-TYPE GRAPHENE DEVICE
摘要 Example embodiments relate to a fin-type graphene device. The fin-type graphene device includes a substrate, a graphene channel layer substantially vertical to the substrate, a gate insulating layer that covers one side surface of the graphene channel layer, a gate electrode on the gate insulating layer, and a source electrode and a drain electrode that are formed separately from each other on other side surface of the graphene channel layer.
申请公布号 US2016087042(A1) 申请公布日期 2016.03.24
申请号 US201514747243 申请日期 2015.06.23
申请人 Samsung Electronics Co., Ltd. 发明人 LEE Minhyun;LEE Jaeho;HEO Jinseong;LEE Kiyoung
分类号 H01L29/16;H01L29/417;H01L29/45;H01L29/786 主分类号 H01L29/16
代理机构 代理人
主权项 1. A graphene device comprising: a substrate; a graphene channel layer substantially vertical to the substrate; a gate insulating layer substantially covering one side surface of the graphene channel layer; a gate electrode on the gate insulating layer; and a source electrode and a separate drain electrode on an other side surface of the graphene channel layer.
地址 Suwon-si KR