| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a protective film capable of forming the protective film having an approximately uniform film thickness on a groove part including a corner part and suppressing the intrusion of moisture, an acid and the like under the protective film even when the groove part and the like are formed on the surface of a workpiece and have the corner part.SOLUTION: A method for forming a protective film where the protective film continuously communicating over the surface of a workpiece from a corner part to the workpiece having the corner part is formed comprises: a coating step coating a protective film material on a portion including at least the ridge part of the corner part in a state that the surface of the workpiece is oriented upward in a vertical direction; a workpiece inversion step holding the workpiece in a state that the surface of the workpiece is oriented downward in a vertical direction; and a drying step drying the protective film material coated at least on the ridge part.SELECTED DRAWING: Figure 2 |
