OPTICAL SENSOR AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an optical sensor.SOLUTION: An optical sensor includes a semiconductive substrate. A light sensing region is on the semiconductive substrate. A waveguide region 200 is configured to guide light from a wave insert portion 20 to a sample holding portion 23 through a waveguide portion. The waveguide portion includes a first dielectric layer having a first refractive index. A second dielectric layer has a second refractive index. The second refractive index is smaller than the first refractive index. A first interconnect portion is positioned in the waveguide portion, and configured to transmit an electrical signal from the light sensing region to an external circuit. The sample holding portion is over the light sensing region.SELECTED DRAWING: Figure 1