发明名称 |
METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID FILMS |
摘要 |
A method for forming an inorganic or hybrid organic/inorganic layer on a substrate, which method comprises vaporizing a metal alkoxide, condensing the metal alkoxide to form a layer atop the substrate, and contacting the condensed metal alkoxide layer with water to cure the layer is disclosed. |
申请公布号 |
US2016083839(A1) |
申请公布日期 |
2016.03.24 |
申请号 |
US201514955316 |
申请日期 |
2015.12.01 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
Bright Clark I.;Maki Stephen P.;Lyons Christopher S.;Nachtigal Alan K.;Zelinsky Maria L.;Invie Judith M.;Dubner Andrew D.;Pellerite Mark J.;Wood Thomas E.;Budd Kenton D. |
分类号 |
C23C16/455;C23C16/46;C23C16/56;C23C16/50 |
主分类号 |
C23C16/455 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method for forming hybrid organic/inorganic layer on a substrate, which method comprises:
vaporizing a metal alkoxide; condensing the metal alkoxide to form a layer atop the substrate; and contacting the condensed metal alkoxide layer with water and an organic compound to cure the layer by a chemical reaction of the metal alkoxide with the water and the organic compound to form an organometallic copolymer, wherein the organic compound is selected from esters, vinyl compounds, alcohols, carboxylic acids, acid anhydrides, acyl halides, thiols, amines and mixtures thereof. |
地址 |
St. Paul MN US |