DEFORMABLE OPTICAL SYSTEM AND METHOD FOR CONTROLLING THE SAME AS WELL AS A LITHOGRAPHIC SYSTEM COMPRISING THE DEFORMABLE OPTICAL SYSTEM

摘要

The deformable optical system comprises at least one optical element (10), an actuator facility (20) and a control unit (30). Therein the at least one optical element (10) has a body (12) with a thermal expansion coefficient and the actuator facility (20) serves to exert a force distribution at a main surface (16) of the body (12). The control unit (30) is arranged for controlling the actuator facility (20) in order to control a shape of the body (12). The actuator facility comprises a body layer (22) formed on said main surface (16) of the body (12) and the body layer has a thermal expansion coefficient differing from the thermal expansion coefficient of the body. The actuator facility further comprises a thermal array (24) facing the body layer (22) and distanced from said body layer (22) by a gap (26). The thermal array has a plurality of thermal elements (250, Ti,T1, . . . T5) distributed at a surface of the thermal array facing the body layer that allow for a heat flow between the thermal array and the body layer. The heat flow has an amplitude controlled by the control unit (30) as a function of the position on the thermal array and as a function of time.

主权项

1. A deformable optical system comprising
at least one optical element having a body with a thermal expansion coefficient, an actuator facility for exerting a force distribution at a main surface of the body, a control unit for controlling the actuator facility in order to control a shape of the body,characterized in that the actuator facility comprises a body layer formed on said main surface of the body, the body layer having a thermal expansion coefficient differing from the thermal expansion coefficient of the body, the actuator facility further comprising a thermal array facing the body layer and distanced from said body layer, a gap being present between the thermal array and said body layer, the thermal array having a plurality of thermal elements distributed at a surface of the thermal array facing the body layer, the thermal elements allowing for a heat flow between the thermal array and the body layer, the heat flow having an amplitude controlled by the control unit as a function of the position on the thermal array and as a function of time to control a spatial distribution of the temperature of the body layer in a contactless way by the temperature distribution of the thermal array characterized in that the thermal elements comprise a combination of cooling and heating elements.