发明名称 |
SUBSTRATE INSPECTION DEVICE |
摘要 |
The present invention relates to a substrate inspection apparatus comprising: a first stage capable of moving itself horizontally and at the same time moving horizontally a loaded substrate as arranged; a first stage capable of moving itself horizontally and at the same time continuously moving horizontally the substrate which has been received from the first stage; and a camera disposed between the first stage and the second stage, for photographing the horizontally moving substrate. |
申请公布号 |
WO2016043379(A1) |
申请公布日期 |
2016.03.24 |
申请号 |
WO2014KR10945 |
申请日期 |
2014.11.14 |
申请人 |
HANWHA TECHWIN CO., LTD. |
发明人 |
LEE, SUNG HUN;HONG, JIN KWANG |
分类号 |
G01N21/89;G01N21/95 |
主分类号 |
G01N21/89 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|