| 摘要 |
The present invention addresses the problem of performing alignment at low cost with high accuracy. In order to solve the problem, according to one embodiment of the present invention, a linear motor system (1) is provided with a linear motor (10), a control device (40), a supporting mechanism (20), and a force sensor (30). The control device (40) controls a current to be supplied to the linear motor (10). The supporting mechanism (20) supports an armature of the linear motor (10). The force sensor (30) detects vibration generated to the armature. Furthermore, the control device (40) has a calculation unit (41a), and an estimation unit (41b). The calculation unit (41a) calculates a force to be applied to a movable element of the armature on the basis of detection results obtained from the force sensor (30). The estimation unit (41b) estimates the position and/or speed of the movable element on the basis of the calculation results obtained from the calculation unit (41a). |
