OZONE SUPPLYING APPARATUS, OZONE SUPPLYING METHOD, AND CHARGED PARTICLE BEAM DRAWING SYSTEM

摘要

An ozone supplying apparatus according to an embodiment of the present invention is an ozone gas supplying apparatus which supplies an ozone gas to a vacuum apparatus. The ozone supplying apparatus includes an ozone generator configured to generate the ozone gas, a first flow controller configured to control a flow rate of the ozone gas generated by the ozone generator, a second flow controller configured to control a flow rate of the ozone gas supplied to the vacuum apparatus, and a main pipe provided on a secondary side of the first flow controller and on a primary side of the second flow controller, with the ozone gas being introduced into the main pipe at such a flow rate that an internal pressure of the main pipe is controlled to be lower than atmospheric pressure by the first flow controller.

主权项

1. An ozone supplying apparatus which supplies ozone gas to a vacuum apparatus, comprising:
an ozone generator configured to generate the ozone gas; a first flow controller configured to control a flow rate of the ozone gas generated by the ozone generator; a second flow controller configured to control a flow rate of the ozone gas supplied to the vacuum apparatus; and a main pipe provided on a secondary side of the first flow controller and on a primary side of the second flow controller, with the ozone gas being introduced into the main pipe at such a flow rate that an internal pressure of the main pipe is controlled to be lower than atmospheric pressure by the first flow controller.