发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR
摘要 A thin film transistor is provided. The thin film transistor comprises: a substrate; an active pattern comprising a nitride, the active pattern being arranged on the substrate; a protection pattern comprising a non-nitride, the protection pattern being arranged on the active pattern; a gate electrode superposed on the active pattern; and a gate insulating film between the gate electrode and the active pattern.
申请公布号 WO2016043485(A1) 申请公布日期 2016.03.24
申请号 WO2015KR09644 申请日期 2015.09.14
申请人 IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 PARK, JINSEONG;OK, KYUNGCHUL;JEONG, HYUNJUN
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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