发明名称 |
THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR |
摘要 |
A thin film transistor is provided. The thin film transistor comprises: a substrate; an active pattern comprising a nitride, the active pattern being arranged on the substrate; a protection pattern comprising a non-nitride, the protection pattern being arranged on the active pattern; a gate electrode superposed on the active pattern; and a gate insulating film between the gate electrode and the active pattern. |
申请公布号 |
WO2016043485(A1) |
申请公布日期 |
2016.03.24 |
申请号 |
WO2015KR09644 |
申请日期 |
2015.09.14 |
申请人 |
IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
PARK, JINSEONG;OK, KYUNGCHUL;JEONG, HYUNJUN |
分类号 |
H01L29/786;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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