| 摘要 |
Provided is a method to regenerate polishing slurry, which prevents the concentrate of polishing scraps from mixing with polishing slurry and easily improves the manufacturing efficiency and yield rate of a substrate. The method to regenerate polishing slurry comprises a regeneration process of regenerating polishing slurry mixed with the ingredients of a small board by polishing the surface of the small board. The small board contains at least aluminum oxide and alkaline earth metal oxide. The regeneration process comprises: adding acid to the polishing slurry mixed with the aluminum oxide and the alkaline earth metal oxide from the small board by polishing the surface of the small board; and removing the aluminum oxide and the alkaline earth metal oxide from the polishing slurry, thereby regenerating the polishing slurry. |
