| 摘要 |
<P>PROBLEM TO BE SOLVED: To precisely control the distance (gap) between a nozzle and a substrate surface. <P>SOLUTION: In a coating method, reference information which is position information of nozzle to be a reference is detected by measurement, the nozzle is cleaned after the measurement of the reference information, actual-measurement information which is the position information of the nozzle is detected by measurement after cleaning, the amount of change of the position of the nozzle is detected from the amount of change of the actual-measurement information and the reference information and when the amount of change of the position of the nozzle is in the range of the preset allowable amount of change of the nozzle, the actual-measurement information is defined as object information and the position of the nozzle is adjusted based on the object information to supply a coating material to a material to be coated. When the amount of change of the position of the nozzle is out of the range of the allowable amount of change, the nozzle is cleaned again, and after that, the coating material is supplied to the material to be coated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
