发明名称 半導体装置の製造方法
摘要 The objective of the present invention is to provide a method of manufacturing a semiconductor device having less contamination of a semiconductor chip and good productivity. The present invention is a method of manufacturing a semiconductor device having a semiconductor chip, with the steps of preparing a plurality of semiconductor chips, preparing a resin sheet having a thermosetting resin layer, arranging the plurality of semiconductor chips on the thermosetting resin layer, arranging a cover film on the plurality of semiconductor chips, and embedding the plurality of semiconductor chips in the thermosetting resin layer by a pressure applied through the arranged cover film, in which the contact angle of the cover film to water is 90° or less.
申请公布号 JP5892780(B2) 申请公布日期 2016.03.23
申请号 JP20110277335 申请日期 2011.12.19
申请人 日東電工株式会社 发明人 清水 祐作;秋月 伸也;小田 高司;豊田 英志;松村 健
分类号 H01L21/56;H01L23/12;H01L23/29;H01L23/31 主分类号 H01L21/56
代理机构 代理人
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