发明名称 半導体装置の製造方法
摘要 <P>PROBLEM TO BE SOLVED: To provide constitution capable of relaxing a thermal stress between a chip and a wiring connection board, in an adhesive sheet having concurrently both a wafer fixing function and a die connecting function. <P>SOLUTION: The adhesive sheet is provided to exhibit concurrently and compatibly the wafer fixing function and the die connecting function, since having an adhesive layer usable as a die bonding agent on a radioactive polymerizable base material. The adhesive layer includes two kinds of resins, phase-separated in a B stage state, having a resin (A) forming a dispersed phase and a resin (B) forming a continuous phase in the B stage state, the resin (A) has 10,000 or less of weight-average molecular weight in an uncured state, and the resin (B) has 100,000 or more of weight-average molecular weight in an uncured state. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5894035(B2) 申请公布日期 2016.03.23
申请号 JP20120180031 申请日期 2012.08.15
申请人 日立化成株式会社 发明人 杉浦 実;長谷川 雄二;愛知 且英;稲田 禎一
分类号 C09J7/02;C09J11/06;C09J133/00;C09J133/14;C09J163/00;C09J201/00;H01L21/301;H01L21/52 主分类号 C09J7/02
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