| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology which properly controls a temperature of a workpiece that is subject to heat treatment. <P>SOLUTION: A temperature is controlled for a workpiece W clamped by an upper clamper part 27 and a lower clamper part 28. Firstly, the workpiece W is clamped by the upper clamper part 27, where a cooling part 32 and a heating part 33 are sequentially provided from the clamp surface 27a side, and the lower clamper part 28. Then, a temperature control mechanism 61, having the cooling part 32 and the heating part 33, continues to heat the workpiece W. At that time, the temperature control mechanism 61 repeats the on-operation and the off-operation of the cooling part 32 while conducting the on-operation of the heating part 33. <P>COPYRIGHT: (C)2013,JPO&INPIT |
