发明名称 VISUAL FEEDBACK FOR INSPECTION ALGORITHMS AND FILTERS
摘要 The disclosure is directed to providing visual feedback for inspection algorithms and difference filters used to process test and reference images from an inspection system. A user interface may be configured for displaying information and accepting user commands. A computing system communicatively coupled to the user interface may be configured to receive at least one set of test and reference images collected by the inspection system. The computing system may be further configured to provide at least one visual representation of the test and reference images via the user interface to show effects of an inspection algorithm and/or difference filter.
申请公布号 EP2847788(A4) 申请公布日期 2016.03.23
申请号 EP20130788048 申请日期 2013.05.07
申请人 KLA-TENCOR CORPORATION 发明人 LEE, HUCHENG;HUANG, JUNQING;GAO, LISHENG
分类号 H01L21/66;G06T7/00;H01L21/00 主分类号 H01L21/66
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