发明名称 DEVICE WITH INTERNAL OPTICAL REFERENCE
摘要 The present invention relates to a device (10) for examining a measured object (12), said device having a workpiece receptacle (14) for receiving the measured object (12) and a measuring head (15) bearing an optical sensor (18), wherein the measuring head (15) and the workpiece receptacle (12) are movable relative to one another, wherein the optical sensor (18) has an object lens (43) and a camera (34) designed to record an image of the measured object (12) through the object lens (43), wherein the object lens (43) has a light inlet aperture (39) and a light exit aperture (41), wherein the object lens (43) has a plurality of lens groups (40, 42, 44, 46, 48) arranged in the object lens (43) in succession along a longitudinal axis (49) of the object lens (43) between the light inlet aperture (39) and the light outlet aperture (41). The device (10) additionally has a reflection element (104) and a calibration arrangement (100), wherein the reflection element (104) can be optionally brought into a beam path (102) running from the measured object (12) through the object lens (43) to the camera (36), and wherein the calibration arrangement (100) is coupled into the beam path (102) to the camera (36) by means of the reflection element (104).
申请公布号 EP2847542(B1) 申请公布日期 2016.03.23
申请号 EP20120753918 申请日期 2012.08.07
申请人 CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH 发明人 ENGEL, THOMAS
分类号 G01B11/00;G01B11/03;G01B21/04 主分类号 G01B11/00
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