ONIUM COMPOUNDS AND METHODS OF SYNTHESIS THEREOF

摘要

Provided are a novel onium salt compound and a synthesizing method thereof. A preferred method of the prevent invention comprises: (a) providing an onium salt compound including a sulfonate component having an electron withdrawing group; and (b) treating the onium salt compound with a halide salt to form a different salt of the onium compound. The onium compound of the present invention is useful as an acid generator component of a photoresist composition.