| 摘要 |
A valve apparatus is equipped with a diaphragm disposed displaceably in the interior of a body, and which opens and closes a fluid passage by separating away from and being seated on a valve seat, a conductive shaft arranged in a through hole that is formed substantially in the center of the diaphragm, and a grounding member for grounding the conductive shaft. Each of the body and the diaphragm is formed from a non-conductive material, and one end surface of the conductive shaft is exposed to the fluid passage. |
