| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transport robot for transporting a weighty substrate with high reliability.SOLUTION: A robot comprises: first and second substrate holding parts 11 and 12 holding a substrate respectively; and first and second arm mechanisms 13 and 14 to which the first and second substrate holding parts 11 and 12 are attached. The first arm mechanism 13 comprises a pair of first arms 19 which is disposed symmetrically to each other about a plain surface including a main revolving shaft. Each of the first arms 19 is configured so that the first arms 19 can bend inwardly at its intermediate portion. The second arm mechanism 14 comprises a pair of second arms 20 which is disposed symmetrically to each other about the plain surface including the main revolving shaft. Each of the second arms 20 is configured so that the second arms 20 can bend outwardly at its intermediate portion. |
