| 摘要 |
The device has a turntable (1), and a cover unit (2) for covering a substrate (9) during distribution process of a liquid medium by rotating the turntable. The turntable is closely joined with the cover unit. A coating inner space formed from the cover unit and the turntable outwardly stays in connection with through-holes. A substrate plate (3) rests at the turntable. The turntable is atmospherically sealed on a side opposite to the substrate. The turntable and the substrate plate are driven by a rotation shaft (6). An independent claim is also included for a method for operating a device for rotary coating of a substrate with a liquid medium. |
