发明名称 n型拡散層形成組成物セット、n型拡散層付き半導体基板の製造方法、及び太陽電池素子の製造方法
摘要 The present invention provides an n-type diffusion layer forming composition containing: a compound including a donor element; a metal compound being a compound different from the compound including the donor element, and containing at least one type of metal element selected from a group comprising an alkaline earth metal and an alkaline metal; and a dispersion medium. Also provided is a production method for a semiconductor substrate having an n-type diffusion layer, whereby the n-type diffusion layer forming composition is applied upon the semiconductor substrate and a composition layer is formed, and the semiconductor substrate having the composition layer formed thereon is heat treated.
申请公布号 JP5892178(B2) 申请公布日期 2016.03.23
申请号 JP20130553307 申请日期 2013.01.10
申请人 日立化成株式会社 发明人 織田 明博;吉田 誠人;野尻 剛;倉田 靖;町井 洋一;岩室 光則;清水 麻理;佐藤 鉄也;芦沢 寅之助
分类号 H01L21/225;H01L31/068;H01L31/18 主分类号 H01L21/225
代理机构 代理人
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