| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum film deposition apparatus and a film deposition method that can exactly measure the position of each of both end parts in the width direction of a long resin film 13 and the position of each of both end parts in the width direction of a thin film formed on the long resin film.SOLUTION: A back feed roll 12, which is disposed on the downstream side of a cooling can roll 10 installed in a vacuum chamber of a vacuum film deposition apparatus, is composed of a cylindrical body of which the outer peripheral surface is in contact with the film deposition surface of a long resin film, a pair of openings (slits) 14, 15 positioned at the positions corresponding to the vicinity of both end parts in the width direction, and a position sensor roll equipped with a sensor head having a light-emitting part disposed at the position corresponding to the slit in the cylindrical body for emitting light to the slit and a light-receiving part for receiving reflection light from the slit. |
