WIRE GRID POLARIZER AND METHOD FOR FABRICATING THE SAME

摘要

According to the present invention, a manufacturing method of a wire grid polarizer comprises the following steps: preparing a substrate where a conductive wire pattern layer and a guide pattern forming a trench on the conductive wire pattern layer are sequentially stacked; processing the conductive wire pattern layer and a surface of the guide pattern to be hydrophobic; coating a neutral layer on the conductive wire pattern layer of the trench which is processed to be hydrophobic; filling a block copolymer of two monomers having different etching ratios on the neutral layer of the trench; aligning the block copolymer; selectively removing one monomer block of the aligned copolymer; and patterning the conductive wire pattern layer by using the remaining monomer block and the guide pattern.