| 摘要 |
The present invention relates to a multi-functional heater for a vacuum device, a method for operating a heater, and a vacuum device having a heater. More particularly, the heater in the vacuum device, which performs a process under a vacuum state, comprises: a stage having one end, and the other end; a sample holder mounted between the one end and the other end of the stage; a sample fixed and installed while being in surface-contact with one side of the sample holder; a first electrode layer having one end thereof positioned to be spaced apart at a particular interval in the one end of the stage, and having the other end thereof positioned to be spaced apart at a particular interval in the other end of the stage; a second electrode layer positioned to be spaced apart at a particular interval in the one end or the other end of the first electrode layer; an insulation layer individually provided between the one end of the stage and the first electrode layer, the other end of the stage and the first electrode layer, and the first and second electrode layers; and a heating wire connected between the first and second electrode layers. |
