MICROSCOPE DETECT APPARATUS AND METHOD USED X-RAY HOLOGRAPHY

摘要

Disclosed in the present invention are a microscope measurement apparatus and a measurement method using X-ray holography for a large area sample. The method disclosed in the present invention comprises: a step of obtaining a hologram diffraction image to obtain an autocorrelation signal of a sample without a reference; a step of obtaining a hologram image by adding a reference to the sample; a step of comparing the image by Fourier-transforming two holograms; and a step of recovering a sample image hidden by difference between two images.