发明名称 積層研磨パッド
摘要 The purpose of the present invention is to provide a long-lived laminated polishing pad wherein a polishing layer is resistant to detachment from a support layer even when high temperatures are produced by long periods of polishing. This laminated polishing pad is characterized that: a polishing layer and a support layer are laminated together with an adhesive member interposed therebetween; said adhesive member is either an adhesive layer containing a polyester-based hot-melt adhesive or double-sided tape that has one of such adhesive layers on each side of a substrate; and for each 100 weight parts of a polyester-resin base polymer, said polyester-based hot-melt adhesive contains 2 to 10 weight parts of an epoxy resin that has at least two glycidyl groups per molecule.
申请公布号 JP5893479(B2) 申请公布日期 2016.03.23
申请号 JP20120084023 申请日期 2012.04.02
申请人 東洋ゴム工業株式会社 发明人 数野 淳;中村 賢治
分类号 B24B37/22;B24B37/24;H01L21/304 主分类号 B24B37/22
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