发明名称 |
METHOD FOR PREPARING POLYURETHANE SUPPORT PAD |
摘要 |
This disclosure relates to a method for preparing a polyurethane mounting pad comprising the steps of: wet-solidifying a resin composition comprising polyurethane resin and a DMF solvent; and immersing the wet-solidified product in an aqueous solution comprising an acid catalyst or a base catalyst. According to the present invention, long and large pores may be uniformly formed inside of the prepared pad, thus affording low hardness, excellent compressibility, and the like, and more uniform thickness, pressure distribution or tension distribution and the like may be exhibited over the whole area of the pad, thus providing a polyurethane mounting pad that can realize more uniform and high efficiency polishing. |
申请公布号 |
EP2998344(A1) |
申请公布日期 |
2016.03.23 |
申请号 |
EP20140850175 |
申请日期 |
2014.10.01 |
申请人 |
LG CHEM, LTD. |
发明人 |
SHIN, DONG MOK;KIM, NA RI;AHN, BYEONG IN;CHOI, SANG SOON;TAE, YOUNG JI;SIN, CHANG HOON |
分类号 |
C08J9/00;B24B41/06;C08G18/16;C08J9/28;C08L75/04 |
主分类号 |
C08J9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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