| 摘要 |
PROBLEM TO BE SOLVED: To provide a reversing device capable of suppressing impairment of a substrate when reversing the substrate.SOLUTION: A reversing device 100 includes a first support member 1, a second support member 2, and a base member 3. The first support member 1 has a first support face 11, and a blowing part 12. The first support member 1 faces downward. The blowing part 12 is constituted to blow a fluid downward. The second support member 2 has a second support face 21, and a suction part 22. The second support face 21 faces upward. The suction part 22 is configured to suck the fluid. The first support face 11 and second support face 21 are constituted to approach each other and to separate from each other. The base member 3 is configured to reverse the positional relationship of the first and second support members 1 and 2.SELECTED DRAWING: Figure 2 |
