发明名称 SHEET PEELING DEVICE AND SHEET PEELING METHOD, AND PEELING START PART FORMATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sheet peeling device and a sheet peeling method, capable of reducing running cost, and capable of preventing an adherent from being lifted to be broken when an adhesive sheet is peeled.SOLUTION: A sheet peeling device 10 includes: a peeling start part formation means 20 forming a peeling start part to an adhesive sheet AS by pulling up an end of the adhesive sheet AS stuck to an adherent WF, the peeling start part being partially peeled off from the adherent WF; and a holding means 30 holding the peeling start part. The peeling start part formation means 20 includes a fluid spraying means 21 spraying a fluid to the end of the adhesive sheet AS thereby to pull up the end of the adhesive sheet AS. The adhesive sheet AS is peeled off from the adherent WF by the relative movement between the adherent WF and the holding means 30.SELECTED DRAWING: Figure 1
申请公布号 JP2016039260(A) 申请公布日期 2016.03.22
申请号 JP20140161836 申请日期 2014.08.07
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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