| 摘要 |
The purpose of the present invention is to provide an electron microscope and a device for holding a sample for an electron microscope, in which the temperature and humidity of the atmosphere in the electron microscope cell can be accurately controlled. An electron microscope provided with an electron source for emitting a first electron beam, an objective lens for causing the first electron beam emitted by the electron source to converge and beaming the first electron beam onto the sample, a detector for detecting the signal generated from the sample, a control means for forming a sample image on the basis of the signal from the detector, a display means for displaying the sample image, and a sample holding means (6) for holding the sample; the electron microscope being characterized in being provided with: a gas supply device for supplying the gas to be introduced into the sample chamber; gas introduction pipes (17a, 17b) for introducing the gas from the gas supply device into the sample chamber; and a heater (24) for controlling the temperature of the gas introduction pipes (17a, 17b), the heater being located on the gas introduction pipes (17a, 17b). |
