主权项 |
1. A probe unit contacting an electrode of a contacted body and an electrode of a contact target at both ends in a longitudinal direction, the probe unit comprising:
a plurality of conductive contact probes, each contacting the electrode of the contacted body at one end in the longitudinal direction; and a probe holder accommodating the plurality of contact probes, wherein each of the contact probe includes:
a plunger including:
a contact portion contacting the electrode of the contacted body;a flange portion extending from a base end of the contact portion and having a diameter larger than a diameter of the contact portion;a boss portion extending from an end of the flange portion different from an end continuing to the contact portion and having a diameter smaller than the diameter of the flange portion; anda base end portion extending from an end of the boss portion different from an end continuing to the flange portion and having a substantially same diameter with the boss portion; anda spring coil attached to the boss portion, the probe holder is made of a conductive material and includes a plurality of holder holes, each having a stepped shape in which diameters at both ends in a thickness direction are decreased and accommodating the respective contact probes, and the flange portion abuts one of step portions of the stepped shape, one end of the spring coil abuts the flange portion, another end of the spring coil abuts another one of the step portions such that the spring coil biases the plunger, the plunger is configured to abut an inner wall surface of the holder hole when a load is applied to the plunger so as to electrically connect the contacted body and the contact target via the probe holder, and the spring coil is made of a conductive material having a higher resistance than the plunger or made of an elastic and insulating material. |